Development of a Three-Dimensional Noncontact Digital Optical Profiler

[+] Author and Article Information
J. C. Wyant, C. L. Koliopoulos

Optical Sciences Center, University of Arizona, Tucson, Ariz. 85721

B. Bhushan

GPD Laboratory, IBM Corporation, Tucson, Ariz. 85744

D. Basila

WYKO Corporation, 2990 E. Fort Lowell, Tucson, Ariz. 85716

J. Tribol 108(1), 1-8 (Jan 01, 1986) (8 pages) doi:10.1115/1.3261137 History: Received May 01, 1985; Online October 29, 2009


A noncontact three-dimensional optical profiler for measuring surface roughness is described. The system consists of a reflection microscope, Mirau interferometer with a reference surface mounted on a piezoelectric transducer, CID detector array, frame grabber, and micro-computer. Interferometric phase-shifting techniques are used to obtain surface height information. The height measurements are processed by a computer to obtain topographical statistical parameters, which are useful in predicting tribological and magnetic performances of the head-media interface in magnetic storage systems. Sample data are presented for magnetic media (tape, floppy disk, and rigid disk), a magnetic head, a silicon wafer, and a glass slide.

Copyright © 1986 by ASME
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