Three-Dimensional Measurement of Head Flying Height and Attitude Using Image Processing of Fringe Patterns Formed by Michelson Laser Interferometry

[+] Author and Article Information
Yasunaga Mitsuya, Akihito Mitsui

Department of Electronic-Mechanical Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-01, Japan

Yasuyuki Kawabe

Fujitsu Laboratories Ltd., Personal System Laboratories, Ookubo-cho, Akashi 674, Japan

Lars Lunde

The University of Trondheim, Division of Machine Design, N-7034, Trondheim, Norway

J. Tribol 118(3), 564-570 (Jul 01, 1996) (7 pages) doi:10.1115/1.2831575 History: Received March 23, 1995; Revised July 17, 1995; Online January 24, 2008


In-situ measurement of head flying height and attitude using image processing of fringe patterns formed by Michelson interferometry is studied. A wide laser beam is applied to illuminate the slider back surface and disk surface simultaneously to create interferometric fringe patterns. Employing the relationships arising between the two fringe patterns, the calculation procedure is formulated to yield the slider’s parallel, pitch and roll displacements. Experimental fringe patterns are captured in a single visual field by a high-speed CCD camera. Image processing for a higher signal-to-noise ratio, such as smoothing, filtering, amplification and ridge line extraction is then applied to the image data. Additionally, average processing with respect to multiple fringe lines to produce higher accuracy is successfully applied. Measured values of flying height and pitch and roll displacements are confirmed to be in good accordance with the calculation results, demonstrating excellent applicability of the present method down to the near-contact region.

Copyright © 1996 by The American Society of Mechanical Engineers
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