Micro-Patterning of Silicon by Frictional Interaction and Chemical Reaction

[+] Author and Article Information
Dae-Eun Kim, Jae-Joon Yi

Department of Mechanical Engineering, Yonsei University, Seoul 120-749, Korea

J. Tribol 120(2), 353-357 (Apr 01, 1998) (5 pages) doi:10.1115/1.2834434 History: Received October 20, 1996; Revised May 26, 1997; Online January 24, 2008


In this paper a novel and economical method of generating three-dimensional micro-patterns on single crystal silicon without the need for a mask is presented. The technique is based on the fundamental understanding of frictional interaction at light loads. Micro-patterning is done through a two-step process that comprises mechanical scribing and chemical etching. The basic idea is to induce micro-plastic deformation along a prescribed track through frictional interaction between the tool and the workpiece. Then, by exposing the surface to a chemical under controlled conditions, preferential chemical reaction is induced along the track to form hillocks about 5 μm wide and 1 μm high. This method of micro-machining may be used for making patterns in micro-electro-mechanical systems (MEMS) at low cost. Furthermore, this process demonstrates how microtribological processes can be utilized in the fabrication of micro-structures.

Copyright © 1998 by The American Society of Mechanical Engineers
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