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TECHNICAL PAPERS

Error Analysis of Head-Disk Spacing Measurements Made by Using Optical Interferometry

[+] Author and Article Information
Yasunaga Mitsuya, Yasuji Ohshima

Nogoya University, Department of Electronic-Mechanical Engineering, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

J. Tribol 123(2), 358-363 (Jun 16, 2000) (6 pages) doi:10.1115/1.1308001 History: Received February 24, 2000; Revised June 16, 2000
Copyright © 2001 by ASME
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References

Figures

Grahic Jump Location
Homodyne interferometry optical system
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Multiple beam interference
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Components of error in flying height
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Polarization interferometry optical system
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Phase difference between s- and p-components
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Relationships between βs−ps, and βp
Grahic Jump Location
Components of error in flying height. (Δβ=Δβmax=Δa=ΔD=0.01.)

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