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TECHNICAL PAPERS

Error Analysis of Head-Disk Spacing Measurements Made by Using Optical Interferometry

[+] Author and Article Information
Yasunaga Mitsuya, Yasuji Ohshima

Nogoya University, Department of Electronic-Mechanical Engineering, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

J. Tribol 123(2), 358-363 (Jun 16, 2000) (6 pages) doi:10.1115/1.1308001 History: Received February 24, 2000; Revised June 16, 2000
Copyright © 2001 by ASME
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References

Mitsuya,  Y., 1998, “Measurement of Ultra Low Spacing: Laser Interferometry,” Jpn. J. Tribol.,43, No. 7, pp. 624–629 (1999 English version by Allerton Press).
Lin,  C., and Sullivan,  R. F., 1972, “An Application of White Light Interferometry in Thin Film Measurements,” IBM J. Res. Dev., 16, No. 3, pp. 269–276.
Ohkubo,  T., and Kishigami,  J., 1988, “Accurate Measurement of Gas-Lubricated Slider Bearing Separation Using Visible Laser Interferometry,” ASME J. Tribol., 110, No. 1, pp. 148–155.
Lacey, C., Adams, J. A., Ross, E. W., and Cormier, A., 1992, “A New Method for Measuring Flying Height Dynamically,” Phase Metric Commun., pp. 27–42.
Muranushi,  F., Tanaka,  K., and Takeuchi,  Y., 1993, “The Ultraviolet Light Interference Method to Measure Slider Flying Height,” ASME Adv. Info. Storage Syst.,5, pp. 435–445.
Fukuzawa,  T., Hisano,  T., and Watabe,  H., 1996, “A Glass Disk Distortion Effect in an Optical Flying Height Tester,” IEEE Trans. Magn., 32, No. 5, pp. 3690–3692.
Groot,  P., Deck,  L., Sooditsky,  J., and Biegen,  J., 1995, “Polarization Interferometer for Measuring the Flying Height of Magnetic Read-Write Heads,” Opt. Lett., 21, No. 6, pp. 441–443.
Duran,  C. A., 1996, “Error Analysis of a Multiwavelength Dynamic Flying Height Tester,” IEEE Trans. Magn., 32, No. 5, pp. 3720–3722.
Herman, I. P., 1996, Optical Diagnostics for Thin Film Processing, Academic Press, New York, p. 335.
Muranushi,  F., Tanaka,  K., and Takeuchi,  Y., 1992, “Estimation of Zero-Spacing Error Due to a Phase Shift of Reflected Light in Measuring a Magnetic Head Slider’s Flying Height by Light Interference,” ASME Adv. Info. Storage Syst.,4, pp. 371–379.
Li,  Y., Menon,  A., and Golia,  P., 1996, “Evaluations of Diamond-Like-Carbon Film Optical Constants and Their Effects on Flying Height Determination,” ASME J. Tribol., 118, No. 4, pp. 767–773.
Azzam, R. M. A., and Bashara, N. M., 1987, Ellipsometry and Polarized Light, Elsevier, New York, p. 285.

Figures

Grahic Jump Location
Homodyne interferometry optical system
Grahic Jump Location
Multiple beam interference
Grahic Jump Location
Components of error in flying height
Grahic Jump Location
Polarization interferometry optical system
Grahic Jump Location
Phase difference between s- and p-components
Grahic Jump Location
Relationships between βs−ps, and βp
Grahic Jump Location
Components of error in flying height. (Δβ=Δβmax=Δa=ΔD=0.01.)

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