Error Analysis of Head-Disk Spacing Measurements Made by Using Optical Interferometry

[+] Author and Article Information
Yasunaga Mitsuya, Yasuji Ohshima

Nogoya University, Department of Electronic-Mechanical Engineering, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

J. Tribol 123(2), 358-363 (Jun 16, 2000) (6 pages) doi:10.1115/1.1308001 History: Received February 24, 2000; Revised June 16, 2000
Copyright © 2001 by ASME
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Grahic Jump Location
Homodyne interferometry optical system
Grahic Jump Location
Multiple beam interference
Grahic Jump Location
Components of error in flying height
Grahic Jump Location
Polarization interferometry optical system
Grahic Jump Location
Phase difference between s- and p-components
Grahic Jump Location
Relationships between βs−ps, and βp
Grahic Jump Location
Components of error in flying height. (Δβ=Δβmax=Δa=ΔD=0.01.)



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