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TECHNICAL PAPERS

Nanomechanical and Nanotribological Properties of Carbon, Chromium, and Titanium Carbide Ultrathin Films

[+] Author and Article Information
W. Lu, K. Komvopoulos

Department of Mechanical Engineering, University of California, Berkeley, CA 94720

J. Tribol 123(4), 717-724 (Jul 25, 2000) (8 pages) doi:10.1115/1.1330737 History: Received February 09, 2000; Revised July 25, 2000
Copyright © 2001 by ASME
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References

Figures

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Contact force versus displacement curves from nanoindentation experiments performed with a 20-nm-radius diamond tip and maximum contact force equal to 20 μN: (a) a-C, (b) TiC, (c) Cr, and (d) Si(100)
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Coefficient of friction of bulk Si(100) versus sliding speed for different contact forces and diamond tip radius equal to (a) 100 nm and (b) 20 μm
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Coefficient of friction of a-C, Cr, and TiC films and bulk Si(100) versus contact force for diamond tip radius of 20 μm and sliding speed of 0.4 μm/s
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Nanoscratches on (a) a-C, (b) TiC, and (c) Cr film surfaces, and (d) Si(100) substrate surface produced with a 100- nm-radius diamond tip under a contact force of 40 μN (sliding speed: (a)–(c) 0.4 μm/s and (d) 0.05–0.8 μm/s)
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Nanowear patterns on (a) a-C, (b) TiC, and (c) Cr film surfaces, and (d) Si(100) substrate surface produced with a 100-nm-radius diamond tip under a contact force of 10 μN after five scanning cycles at a sliding speed of 4 μm/s
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Nanowear patterns on (a) a-C, (b) TiC, and (c) Cr film surfaces, and (d) Si(100) substrate surface produced with a 100-nm-radius diamond tip under a contact force of (a) 50 μN and (b)–(d) 40 μN after one scanning cycle at a sliding speed of 4 μm/s
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Wear depth versus wear cycles for bulk Si(100), 100-nm-radius diamond tip, 4 μm/s sliding speed, and contact force in the range of 3–13 μN
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Wear depth versus wear cycles for a-C, TiC, and Cr films, 100-nm-radius diamond tip, 4 μm/s sliding speed, and contact force equal to (a) 10 μN and (b) 40 μN
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Relative specific energy versus wear depth for a-C, TiC, and Cr films, 100-nm-radius diamond tip, 4 μm/s sliding speed, and contact force equal to 40 μN

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