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TECHNICAL PAPERS

Manufacturing Effects in Microfabricated Gas Bearings: Axially Varying Clearance

[+] Author and Article Information
E. S. Piekos

Department of Aeronautics and Astronautics, Massachusetts Institute of Technology, Cambridge, MA 02139

K. S. Breuer

Brown University, Division of Engineering, Box D, 182 Hope Street, Providence, RI 02912

J. Tribol 124(4), 815-821 (Sep 24, 2002) (7 pages) doi:10.1115/1.1430672 History: Received April 06, 2000; Revised May 22, 2001; Online September 24, 2002
Copyright © 2002 by ASME
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References

Epstein, A. H., Senturia, S. D., Anathasuresh, G., Ayón, A., Breuer, K. S., Chen, K.-S., Ehrich, F. E., Esteve, E., Frechette, L., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Kerrebrock, J. L., Lang, J. H., Lin, C.-C., London, A., Lopata, J., Mehra, A., Mur Miranda, J. O, Nagle, S., Orr, D. J., Piekos, E. S., Schmidt, M. A., Shirley, G., Spearing, S. M., Tan, C. S., Tzeng, Y.-S., and Waitz, I. A., 1997, “Micro-Heat Engines, Gas Turbines, and Rocket Engines—The MIT Microengine Project,” AIAA 97-1773, 28th AIAA Fluid Dynamics Conference, Snowmass Village, CO.
Reynolds,  D. B., and Gross,  W. A., 1962, “Experimental Investigation of Whirl in Self-Acting Air-Lubricated Journal Bearings,” ASLE Trans., 5, pp. 392–403.
Cheng,  H. S., and Pan,  C. H. T., 1965, “Stability Analysis of Gas-Lubricated, Self-Acting, Plain, Cylindrical, Journal Bearings of Finite Length, Using Galerkin’s Method,” J. Basic Engineering, 87, No. 1, pp. 185–192.
Sternlicht,  B., and Winn,  L. W., 1963, “On the Load Capacity and Stability of Rotors in Self-Acting Gas Lubricated Plain Cylindrical Journal Bearings,” J. Basic Engineering, 85, pp. 503–512.
Ayón,  A. A., Braff,  R., Lin,  C. C., Sawin,  H. H., and Schmidt,  M. A., 1999, “Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher,” J. Electrochem. Soc., 146, No. 1, pp. 339–349.
Piekos, E. S., 2000, “Numerical Simulation of Gas-Lubricated Journal Bearings for Microfabricated Machines,” Ph.D. dissertation, Massachusetts Institute of Technology, Department of Aeronautics and Astronautics, Cambridge, MA.
Piekos,  E. S., and Breuer,  K. S., 1999, “Pseudospectral Orbit Simulation of Nonideal Gas-Lubricated Journal Bearings for Microfabricated Turbomachines,” J. Tribology, 121, No. 3, pp. 604–609.
Castelli,  V., and Elrod,  H. G., 1965, “Solution of the Stability Problem for 360 deg. Self-Acting, Gas-Lubricated Bearings,” J. Basic Engineering, 87, No. 1, pp. 199–212.
Boyd, J. P., 1989, “Chebyshev and Fourier Spectral Methods,” editors, Lecture Notes in Engineering, in C. A. Brebbia and S. A. Orszag, eds., Vol. 49, Springer-Verlag, New York.
Hamrock, B. J., 1994, Fundamentals of Fluid Film Lubricaton, McGraw-Hill Series in Mechanical Engineering, McGraw-Hill, Inc., New York.
Orr, D. J., 2000. “Macro-Scale Investigation of High Speed Gas Bearings for MEMS Devices,” Ph.D. dissertation, Massachusetts Institute of Technology, Department of Aeronautics and Astronautics, Cambridge, MA.
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Figures

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Journal bearing cross-section with relevant dimensions noted. The journal (inner member) is rotating clockwise while the bearing (outer member) is stationary. The bearing has length L measured perpendicular to the page.
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Scanning electron micrographs showing bow and taper in etched channels 5. Figures courtesy A. Ayón: (a) bow; and (b) taper.
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Normalized pressure distributions for constant-clearance, tapered, and bowed bearings. In all cases, L/D=0.075, Λ=5, and ε=0.85: (a) constant-clearance, (b) 25 percent bow, and (c) 25 percent taper.
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Comparison of results for tapered bearings of various L/D, ε, and Δc with estimates computed from constant-clearance data using Eq. 3: (a) load parameter and (b) attitude angle.
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Comparison of results for bowed bearings of various L/D, ε, and Δc with estimates computed from constant-clearance data using Eq. 3: (a) load parameter and (b) attitude angle.
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Percent change in steady-state parameters when 25 percent taper is added to an L/D=0.075 journal bearing
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Percent change in steady-state parameters when 25 percent bow is added to an L/D=0.075 journal bearing
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Effect of clearance bow and taper on stability boundaries for L/D=0.075 bearings with M̄=0.5: (a) tapered clearance and (b) bowed clearance.
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Effect of bow and taper on required load: (a) tapered clearance and (b) bowed clearance.
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Effect of increasing levels of taper on εmin at three values of Λ for an L/D=0.075 bearing with M̄=0.5
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Effect of increasing levels of taper on εmin at three values of Λ for an L/D=0.15 bearing with M̄=0.5
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Effect of increasing levels of taper on εmin in an L/D=0.15 bearing at Λ=5 for three values of M̄
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Estimation of taper effect on minimum stable eccentricity using Eq. 3 with β=0.45
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Estimation of taper effect on minimum stable load using Eq. 3 with β=0.45

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