Adhesion and Pull-Off Forces for Polysilicon MEMS Surfaces Using the Sub-Boundary Lubrication Model

[+] Author and Article Information
Allison Y. Suh, Andreas A. Polycarpou

Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801

J. Tribol 125(1), 193-199 (Dec 31, 2002) (7 pages) doi:10.1115/1.1506313 History: Received February 02, 2001; Revised June 11, 2002; Online December 31, 2002
Copyright © 2003 by ASME
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Schematic of the relevant interfacial forces at a typical MEMS interface
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GW contacting rough surface model
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Typical AFM image for polished single crystal silicon sample
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Dimensionless forces versus dimensionless separation for Case A—Rough Interface (σ=15.8 nm)
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Dimensionless forces versus dimensionless separation for Case C—Smooth Interface (σ=1.4 nm)
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Adhesion force per unit area, Fs/An versus separation, h for Cases A, B, C, and D
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Pull-off force, F, versus separation, h for Cases C—Smooth Interface (σ=1.4 nm)
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Pull-off Force, F, versus area for experiments 14 and calculated from SBL model




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