0
TECHNICAL PAPERS

Nano-Scale Fatigue Wear of Carbon Nitride Coatings: Part I—Wear Properties

[+] Author and Article Information
Dong F. Wang

Laboratory of Biomechanical Engineering, Department of Mechatronics and Precision Engineering, Faculty of Engineering, Tohoku University, Sendai 980-8579, Japan

Koji Kato

Laboratory of Tribology, School of Mechanical Engineering, Tohoku University, Sendai 980-8579, Japan

J. Tribol 125(2), 430-436 (Mar 19, 2003) (7 pages) doi:10.1115/1.1537266 History: Received June 28, 2001; Revised August 01, 2002; Online March 19, 2003
Copyright © 2003 by ASME
Your Session has timed out. Please sign back in to continue.

References

Holmberg  K., and Matthews,  A., 1994, Coatings Tribology, Dowson, D., eds., Tribology Series, 28, Elsevier, pp. 125–235.
Erdemir, A., Switala, M., Wie, R., and Wilbur, P., 1991, Surface and Coatings Technology, 50 , pp. 17.
Grill,  A., 1997, “Tribology of Diamondlike Carbon and Related Materials: An Updated Review,” Surf. Coat. Technol., 94/95, pp. 507–513.
Donnet,  C., Mogne,  T. Le, Ponsonnet,  L., Belin,  M., Grill,  A., Patel,  V., and Jahnes,  C., 1998, “The Respective Role of Oxygen and Water Vapor on the Tribology of Hydrogenated Diamond-like Carbon Coatings,” Tribol. Lett., 4, pp. 259–265.
Liu,  A. Y., and Cohen,  M. L., 1989, “Prediction of New Low Compressibility Solid,” Science, 245, pp. 841–842.
Liu,  A. Y., and Cohen,  M. L., 1990, “Structural Properties and Electronic Structure of Low Compressibility Materials: β-Si3N4 and Hypothetical β-C3N4,” Phys. Rev. A, 15, pp. 10727–10734.
Chen,  M. Y., Lin,  X., Dravid,  V. P., Chung,  Y. W., Wong,  M. S., and Sproul,  W. D., 1993, “Synthesis and Tribological Properties of Carbon Nitride as a Novel Superhard Coating and Solid Lubricant,” Tribol. Trans., 36, pp. 491–495.
Li,  D., Cutiongco,  E., Chung,  Y.-W., Wong,  M. S., and Sproul,  W. D., 1994, “Composition, Structure and Tribological Properties of Amorphous Carbon Nitride Coatings,” Surf. Coat. Technol., 68–69, pp. 611–615.
Sjostrom,  H., Ivanov,  I., Johansson,  M., Hultman,  L., Sundgren,  J.-E., Hainsworth,  S. V., Page,  T. F., and Wallenberg,  L. R., 1994, “Reactive Magnetron Sputter Deposition of CNx Films on Si(001) Substrates: Film Growth, Microstructure and Mechanical Properties,” Thin Solid Films, 246, pp. 103–109.
Wang,  X., Martin,  P. J., and Kinder,  T. J., 1995, “Optical and Mechanical Properties of Carbon Nitride Films Prepared by Ion-Assisted Arc Deposition and Magnetron Sputtering,” Thin Solid Films, 256, pp. 148–154.
Kola,  P. V., Cameron,  D. C., Hashmi,  M. S. J., Meenan,  B. J., Pischow,  K. A., Anderson,  C. A., and Brown,  N. M. D., 1995, “Magnetron-Sputtered Carbon Nitride (CNx) films,” Surf. Coat. Technol., 74–75, pp. 696–703.
Hrdina, J., Jastrabik, L., Fendrich, F., and Sobota, J., 1995, 6th Int. Summer School ‘Modern Plasma Technology’, Mielno’95, 30 May–1 June.
Novikov,  N., Voronkin,  M. A., Smekhnor,  A. A., Zaika,  N. I., and Zakharchuk,  A. P., 1995, “Deposition by Reactive Ion-Plasma Sputtering and Characterization of C-N thin Films,” Diamond Relat. Mater., 4, pp. 390–393.
Veprek,  S., Weidmann,  J., and Glatz,  F., 1995, “Plasma Chemical Vapor Deposition and Properties of Hard C3N4 Thin Films,” J. Vac. Sci. Technol. A, A13, pp. 2914–2919.
Ogata,  K., Chubaci,  J. F. D., and Fujimoto,  F., 1994, “Properties of Carbon Nitride Films with Composition Ratio C/N=0.5–3.0 Prepared by the Ion and Vapor Deposition Method,” J. Appl. Phys., 76, pp. 3791–3796.
Suzuki, S., Matsuura, T., Uchizawa, M., Yura, S., and Shibata, H., 1991, “Friction and Wear Studies on Lubricants and Materials Applicable to MEMS,” Proc. IEEE Micro Electro Mechanical Systems, Nara, Japan, 30 January– 2 February, pp. 143–147.
Den, K., and Ko, W. H., 1992, “Application of Diamond-like Carbon Film for Microdynamic Devices,” Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 22–25 June, pp. 98–101.
Houston,  M. R., Howe,  R. T., Komvopoulos,  K., and Maboudian,  R., 1995, “Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices,” Mater. Res. Soc. Symp. Proc., 383, pp. 391–402.
Tsumaki,  N., 2000, “Semiconductor Manufacturing Equipment,” Journal of Japanese Society of Tribologists, 45, pp. 932–935.
Prioli,  R., Zanette,  S. I., Caride,  A. O., Franceschini,  D. F., and Freire,  F. L. , 1996, “Atomic Force Microscopy of Amorphous Hydrogenated Carbon-nitrogen Film Deposited by Radio-frequency-plasma Decomposition of Methane-Ammonia Gas Mixtures,” J. Vac. Sci. Technol. A, A14, pp. 2351–2355.
Koskinen,  J., Hirvonen,  J. P., Levoska,  J., and Torri,  P., 1996, “Tribological Characterization of Carbon-Nitrogen Coatings Deposited by Using Vacuum Arc Discharge,” Diamond Relat. Mater., 5, pp. 669–673.
Cutiongco,  E. C., Li,  D., Chung,  Y. W., and Bhatia,  C. S., 1996, “Tribological Behavior of Amorphous Carbon Nitride Overcoats for Magnetic Thin-Film Rigid Disks,” ASME J. Tribol., 118, pp. 543–548.
Hajek,  V., Rusnak,  K., Vlcek,  J., Martinu,  L., and Hawthorne,  H. M., 1997, “Tribological Study of CNx Films Prepared by Reactive d.c. Magnetron Sputtering,” Wear, 213, pp. 80–89.
Wang,  D. F., and Kato,  K., 1998, “Friction Studies of Ion Beam Assisted Carbon Nitride Coating Sliding Against Diamond Pin in Water Vapor,” Wear, 217, pp. 307–311.
Wang,  D. F., Kato,  K., and Umehara,  N., 2000, “Mechanical Characterization and Tribological Evaluation of Ion-Beam-Assisted Sputter Coatings of Carbon With Nitrogen Incorporation,” Surf. Coat. Technol., 123, pp. 177–184.
Khurshudov,  A., Kato,  K., and Koide,  H., 1997, “Wear of the AFM Diamond Tip Sliding Against Silicon,” Wear, 203–204, pp. 22–27.
Sundararajan,  S., and Bhushan,  B., 1999, “Micro/Nanotribology of Ultra-Thin Amorphous Carbon Coatings Using Atomic Force/Friction Force Microscopy,” Wear, 225–229, pp. 678–689.
Stachowiak, G. W., 1997, “Numerical Characterization of Wear Particle Morphology and Angularity of Particles and Surfaces,” New Directions in Tribology, Hutchings, I. M., eds., MEP Publications Ltd., pp. 371–389.
Stachowiak, G. W., 1998, “Particle Angularity and Its Relationship to Abrasive and Erosive Wear,” Proc. 5th International Tribology Conference in Australia (AUSTRIB’98-Tribology at Work), Hargreaves, D. J., and Scott, W., eds., pp. 465–470.
Wang,  D. F., and Kato,  K., 2002, “In-Situ Examination of Wear Particle Generation in Carbon Nitride Coatings by Repeated Sliding Contact against a Spherical Diamond,” Wear, 253, pp. 519–526.
Gabriel,  K. J., Behi,  F., Mahadevan,  R., and Mehregany,  M., 1990, “In Situ Friction and Wear Measurements in Integrated Poly-Silicon Mechanisms,” Sens. Actuators, A21–A23, pp. 184–188.

Figures

Grahic Jump Location
Generation of wear particles of a carbon nitride coating, in terms of normal load and friction cycles, based on in situ examination by E-SEM
Grahic Jump Location
Schematic diagram, for definition of the critical number of friction cycles, Nc, for the generation of feather-like wear particles by in-situ observation with E-SEM
Grahic Jump Location
A typical sliding process of a carbon nitride coating, of 100 nm thickness, against a diamond pin, in situ examined by E-SEM at normal load of 80 mN and humidity of 24 percent, where (a) shows no observable wear particles, (b) initial formation of feather-like wear particles, (c) and (d) show the further generation of wear particles for 16 and 20 friction cycles, respectively.
Grahic Jump Location
Three-dimensional AFM images of contact tracks in carbon nitride coating surfaces, after 1, 6, 8, 9, 16, and 20 friction cycles, respectively. P-V means the peak-to-valley value of the wear track: (a) P-V=5.09 nm; (b) P-V=6.61 nm; (c) P-V=7.32 nm; (d) P-V=16.54 nm; (e) P-V=18.02 nm; and (f ) P-V=62.70 nm.
Grahic Jump Location
An AFM image after 9 cycles (a), and the cross-sectional profile at the circle of the broken line (b), showing the scar of the “Delamination”
Grahic Jump Location
An AFM image after 8 cycles (a), and the cross-sectional profile at the circle of the broken line (b), showing the scar of the deformed penetration pits
Grahic Jump Location
Typical methodology for measuring the width and P-V value of contact track (b) in the AFM image (a), and for measuring the area using the triangular approximation (c) for the wear volume, and thus the specific wear amount
Grahic Jump Location
P-V value of the contact track and the “Delamination” (a), and width of the contact track (b), for carbon nitride coating surface with respect to the number of friction cycles
Grahic Jump Location
Effect of friction cycles on wear volume, corresponding to observations in Fig. 3 and Fig. 4. The volume of valleys is assumed to be positive wear and the volume of peaks as negative wear.
Grahic Jump Location
Effect of friction cycles on specific wear amount, corresponding to observations in Fig. 3 and Fig. 4
Grahic Jump Location
Effect of normal load on wear volume, corresponding to observations in Fig. 1 for 20 friction cycles
Grahic Jump Location
Effect of normal load on specific wear amount, corresponding to observations in Fig. 1 for 20 friction cycles

Tables

Errata

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In