Mechanical Properties of Nanocomposite TiN/Si3N4 Films Synthesized by Ion Beam Assisted Deposition (IBAD)

[+] Author and Article Information
Chenhui Zhang, Jianbin Luo, Darong Chen

State Key Laboratory of Tribology, Tsinghua University, Beijing, P. R. China

Wenzhi Li

Institute of Material Science and Technique, Tsinghua University, Beijing, P. R. China

J. Tribol 125(2), 445-447 (Mar 19, 2003) (3 pages) doi:10.1115/1.1537749 History: Received January 30, 2002; Revised July 23, 2002; Online March 19, 2003
Copyright © 2003 by ASME
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IBAD instrument [1-Connect to Vacuum pump; 2-Substrate holder; 3-Substrate; 4,5-Sputtering ion source; 6-Target; 7-Assisted bombarding ion source; 8-High energy ion source]
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Auger electron spectrum of the coating with 0.3 Si/Ti ratio
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X-ray diffraction patterns from various coatings
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Nanoindentation hardness of TiN/Si3N4 coatings as function of Si/Ti ratio
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Profilometer traces across wear tracks: (a) Uncoated AISI 52100 (H=11 GPa); and (b) AISI 52100 with TiN/Si3N4 coating (Si/Ti=0.3, H=42 GPa).




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