0
TECHNICAL PAPERS

Mechanical Properties of Nanocomposite TiN/Si3N4 Films Synthesized by Ion Beam Assisted Deposition (IBAD)

[+] Author and Article Information
Chenhui Zhang, Jianbin Luo, Darong Chen

State Key Laboratory of Tribology, Tsinghua University, Beijing, P. R. China

Wenzhi Li

Institute of Material Science and Technique, Tsinghua University, Beijing, P. R. China

J. Tribol 125(2), 445-447 (Mar 19, 2003) (3 pages) doi:10.1115/1.1537749 History: Received January 30, 2002; Revised July 23, 2002; Online March 19, 2003
Copyright © 2003 by ASME
Your Session has timed out. Please sign back in to continue.

References

Veprek,  S., and Reiprich,  S., 1995, “Concept for the Design of Novel Superhard Coatings,” Thin Solid Films, 268, pp. 64–71.
Veprek,  S., Reiprich,  S., and Shizhi,  L., 1995, “Superhard Nanocrystalline Composite Materials: The TiN/Si3N4 System,” Appl. Phys. Lett., 66, pp. 2640–2642.
Diserens,  M., Patscheider,  J., and Levy,  F., 1999, “Mechanical Properties and Oxidation Resistance of Nanocomposite TiN-SiNx Physical-Vapor-Deposited Thin Films,” Surf. Coat. Technol., 120–121, pp. 158–165.
Vaz,  F., Rebouta,  L., Almeida,  B., 1999, “Structural Analysis of Ti1−xSixNy Nanocomposite Films Prepared by Reactive Magnetron Sputtering,” Surf. Coat. Technol., 120–121, pp. 166–172.
Niederhofer,  A., Nesladek,  P., Mannling,  H.-D., 1999, “Structural Properties, Internal Stress and Thermal Stability of nc-TiN/a-Si3N4,nc-TiN/TiSix and nc-(Ti1−yAlySix)N Superhard Nanocomposite Coatings Reaching the Hardness of Diamond,” Surf. Coat. Technol., 120–121, pp. 173–178.
Rebouta,  L., Tavares,  C. J., Aimo,  R., 2000, “Hard Nanocomposite Ti-Si-N Coatings Prepared by DC Reactive Magnetron Sputtering,” Surf. Coat. Technol., 133–134, pp. 234–239.
Veprek,  S., 1997, “Conventional and New Approaches Towards The Design of Novel Superhard Materials,” Surf. Coat. Technol., 97, pp. 15–22.
Veprek,  S., 1997, “Electronic and Mechanical Properties of Nanocrystalline Composites When Approaching Molecular Size,” Thin Solid Films, 297, pp. 145–153.
Veprek,  S., Niederhofer,  A., Moto,  K., 2000, “Composition, Nanostructure and Origin of the Ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 Nanocomposites With Hv=80 to ≥105 GPa,” Surf. Coat. Technol., 133–134, pp. 152–159.
Musil,  J., Karvankova,  P., and Kasl,  J., 2001, “Hard and Superhard Zr-Ni-N Nanocomposite Films,” Surf. Coat. Technol., 139, pp. 101–109.
Neerinck,  D., Persoone,  P., Sercu,  M., 1998, “Diamond-Like Nanocomposite Coatings (a-C:H/a-Si:O) for Tribological Applications,” Diamond Relat. Mater., 7, pp. 468–471.
Zehnder,  T., and Patscheider,  J., 2000, “Nanocomposite TiC/a-C:H Hard Coatings Deposited by Reactive PVD,” Surf. Coat. Technol., 133–134, pp. 138–144.
Musil,  J., Zeman,  P., Hruby,  H., 1999, “ZrN/Cu Nanocomposite Film—A Novel Superhard Material,” Surf. Coat. Technol., 120–121, pp. 179–183.
Musil,  J., 2000, “Hard and Superhard Nanocomposite Coatings,” Surf. Coat. Technol., 125, pp. 322–330.
Veprek,  S., 1998, “New Development in Superhard Coatings: The Superhard Nanocrystalline Amorphous Composites,” Thin Solid Films, 317, pp. 449–454.
Cotell,  C. M., and Hirvonen,  J. K., 1996, “Effect of Ion Energy on the Mechanical Properties of Ion Beam Assisted Deposition (IBAD) Wear Resistant Coatings,” Surf. Coat. Technol., 81, pp. 118–125.
Colligon,  J. S., 1991, “Applications of Ion-Beam Assisted Deposition,” Mater. Sci. Eng., A, 139, pp. 199–206.
Klug, H. P., and Alexander, L. E., 1974, X-Ray Diffraction Procedures, Wiley, New York.
Roy,  R. A., Cuomo,  J. J., and Yee,  D. S., 1988, “Control of Microstructure and Properties of Copper Films Using Ion-Assisted Deposition,” J. Vac. Sci. Technol. A, 6, pp. 1621–1626.
Christiansen,  S., Albrecht,  M., Strunk,  H. P., 1998, “Microstructure of Novel Superhard Nanocrystalline-Amorphous Composites as Analyzed by High Resolution Transmission Electron Microscopy,” J. Vac. Sci. Technol. B, 16, pp. 19–22.
Veprek,  S., 1999, “The Search for Novel, Superhard Materials,” J. Vac. Sci. Technol. A, 17, pp. 2401–2420.
Sambasivan,  S., and Petuskey,  W. T., 1994, “Phase Chemistry in the Ti-Si-N System—Thermochemical Review With Phase-Stability Diagrams,” J. Mater. Res., 9, pp. 2362–2369.

Figures

Grahic Jump Location
IBAD instrument [1-Connect to Vacuum pump; 2-Substrate holder; 3-Substrate; 4,5-Sputtering ion source; 6-Target; 7-Assisted bombarding ion source; 8-High energy ion source]
Grahic Jump Location
Auger electron spectrum of the coating with 0.3 Si/Ti ratio
Grahic Jump Location
X-ray diffraction patterns from various coatings
Grahic Jump Location
Nanoindentation hardness of TiN/Si3N4 coatings as function of Si/Ti ratio
Grahic Jump Location
Profilometer traces across wear tracks: (a) Uncoated AISI 52100 (H=11 GPa); and (b) AISI 52100 with TiN/Si3N4 coating (Si/Ti=0.3, H=42 GPa).

Tables

Errata

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In