0
TECHNICAL PAPERS

Mechanical Properties of Nanocomposite TiN/Si3N4 Films Synthesized by Ion Beam Assisted Deposition (IBAD)

[+] Author and Article Information
Chenhui Zhang, Jianbin Luo, Darong Chen

State Key Laboratory of Tribology, Tsinghua University, Beijing, P. R. China

Wenzhi Li

Institute of Material Science and Technique, Tsinghua University, Beijing, P. R. China

J. Tribol 125(2), 445-447 (Mar 19, 2003) (3 pages) doi:10.1115/1.1537749 History: Received January 30, 2002; Revised July 23, 2002; Online March 19, 2003
Copyright © 2003 by ASME
Your Session has timed out. Please sign back in to continue.

References

Figures

Grahic Jump Location
IBAD instrument [1-Connect to Vacuum pump; 2-Substrate holder; 3-Substrate; 4,5-Sputtering ion source; 6-Target; 7-Assisted bombarding ion source; 8-High energy ion source]
Grahic Jump Location
Auger electron spectrum of the coating with 0.3 Si/Ti ratio
Grahic Jump Location
X-ray diffraction patterns from various coatings
Grahic Jump Location
Nanoindentation hardness of TiN/Si3N4 coatings as function of Si/Ti ratio
Grahic Jump Location
Profilometer traces across wear tracks: (a) Uncoated AISI 52100 (H=11 GPa); and (b) AISI 52100 with TiN/Si3N4 coating (Si/Ti=0.3, H=42 GPa).

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In