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TECHNICAL PAPERS

The Seal System in Aerostatic Journal Bearings for High Vacuum Chambers

[+] Author and Article Information
S. Yoshimoto, Y. Yoshida, K. Yagi

Tokyo University of Science, Department of Mechanical Engineering, 1-3 Kagurazaka Shinjuku-ku, Tokyo 162-8601, Japan

J. Tribol 126(2), 310-315 (Apr 19, 2004) (6 pages) doi:10.1115/1.1611498 History: Received March 21, 2003; Revised July 11, 2003; Online April 19, 2004
Copyright © 2004 by ASME
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References

Pollock, J. D., 1988, “Linear Gas Bearing With Integral Vacuum Seal for Use in Serial Process Ion Implantation Equipment,” US Patent No. US 4,726,689.
Yokomatsu, T., 1988, “Static Pressure Bearing,” US Patent No. US 4,749,283.
Bisschops, T. H. J., Soemers, H. M. J. R., Vijfvinkel, J., Driessen, J. C., Renkens, M. M. J., and Bouwer, A. G., 2002, “Movable Support in a Vacuum Chamber and Its Application in Lithographic Projection Apparatus,” US Patent No. US 6,421,112 B1.
Gans,  R. F., 1985, “Lubrication Theory of Arbitrary Knudsen Number,” ASME J. Tribol., 107(3), p. 431.
Fukui,  S., and Kaneko,  R., 1987, “Analysis of Ultra-Thin Gas Film Lubrication Based on Linearized Boltzmann Equation (1st Report, Derivation of Generalized Lubrication Equation),” Trans. JSME, 53(487), p. 829 (in Japanese).
Cercignani,  C., and Daneri,  A., 1963, “Flow of Rarefied Gas Between Two Parallel Plates,” J. Appl. Phys., 34(12), p. 3509.
Cercignani,  C., and Pagani,  C. D., 1966, “Variational Approach to Boundary-Value Problems in Kinetic Theory,” Phys. Fluids, 9(6), p. 1167.

Figures

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Structure of a vacuum chamber installed with a rotational spindle supported by an aerostatic journal bearing with seal system
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Geometrical configurations of two-stage and three-stage seal systems
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Numerical results of Q(D) and fitted curve
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Comparison of pressure distributions between two-stage and three-stage seal systems
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Effect of seal gap on the vacuum chamber pressure
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Effect of seal length on the pressure distribution
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Effect of leakage and outgassing rates on the vacuum chamber pressure
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Experimental apparatus for measuring the leakage and outgassing rates
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Relationship between vacuum chamber pressure and elapsed time for pumping

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