Head-Disk Spacing Measurement Using Michelson Laser Interferometry as Observed Through Glass Disk

[+] Author and Article Information
Yasunaga Mitsuya

Nagoya University, Department of Micro System Engineering, Furo-cho Chikusa-ku, Nagoya 464-8603, Japane-mail: mitsuya@nuem.nagoya-u.ac.jp

Yasuhiro Kawamoto

Toshiba Digital Media Network Co. Ltd., Suehiro-cho 2-9, Ohme, Tokyo 198-8710, Japane-mail: y-kawamo@k3.dion.ne.jp

Hedong Zhang

Nagoya University, Department of Micro System Engineering, Furo-cho Chikusa-ku Nagoya 464-8603, Japane-mail: zhang@nuem.nagoya-u.ac.jp

Hiroyuki Oka

Sharp Corp., Audio-Visual Systems Group, Hachihon-matsu-iida 2-13-2, Higashi-hiroshima 739-0192, Japane-mail: oka-h@cmn1.hro.sharp.co.jp

J. Tribol 126(2), 360-366 (Apr 19, 2004) (7 pages) doi:10.1115/1.1645870 History: Received March 18, 2003; Revised September 16, 2003; Online April 19, 2004
Copyright © 2004 by ASME
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Principle of Michelson Interferometry through glass disk
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Fringe parameters and image areas captured on CCD
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Optical system and experimental apparatus
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Multiple image processing: (a) original image, (b) after median filtering, (c) after spatial filtering, (d) after ridgeline extraction, and (e) after straightening
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Reproducibility in driving reference mirror for fringe interval
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Wobbling technique to capture fringe image lying at a prescribed position
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Suppression of spacing fluctuation by reducing window width
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Experimental slider configuration
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Stratified structure of slider surface
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Multiple interferences considering stratified structure between slider and disk
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Calculated corrections of phase shift: (a) Effects of Si underlayer and (b) Effects of DLC overcoat
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Comparisons between measurements and calculations




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