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TECHNICAL PAPERS

Head-Disk Spacing Measurement Using Michelson Laser Interferometry as Observed Through Glass Disk

[+] Author and Article Information
Yasunaga Mitsuya

Nagoya University, Department of Micro System Engineering, Furo-cho Chikusa-ku, Nagoya 464-8603, Japane-mail: mitsuya@nuem.nagoya-u.ac.jp

Yasuhiro Kawamoto

Toshiba Digital Media Network Co. Ltd., Suehiro-cho 2-9, Ohme, Tokyo 198-8710, Japane-mail: y-kawamo@k3.dion.ne.jp

Hedong Zhang

Nagoya University, Department of Micro System Engineering, Furo-cho Chikusa-ku Nagoya 464-8603, Japane-mail: zhang@nuem.nagoya-u.ac.jp

Hiroyuki Oka

Sharp Corp., Audio-Visual Systems Group, Hachihon-matsu-iida 2-13-2, Higashi-hiroshima 739-0192, Japane-mail: oka-h@cmn1.hro.sharp.co.jp

J. Tribol 126(2), 360-366 (Apr 19, 2004) (7 pages) doi:10.1115/1.1645870 History: Received March 18, 2003; Revised September 16, 2003; Online April 19, 2004
Copyright © 2004 by ASME
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References

Ohkubo,  T., and Kishigami,  J., 1988, “Accurate Measurement of Gas-Lubricated Slider Bearing Separation Using Visible Laser Interferometry,” Trans. ASME J. Tribol., 110(1), pp. 148–155.
Lacey, C., Adams, J. A., Ross, E. W., and Cormier, A., 1992, “A New Method for Measuring Flying Height Dynamically,” Phase Metric Communication.
Muranushi, F., Tanaka, K., and Takeuchi, Y., 1992, “Estimation of the Zero-Spacing Error Due to a Phase Shift of Reflected Light in Measuring a Magnetic Head Slider’s Flying Height by Light Interference,” Adv. Info. Storage Syst., 4 , ASME Press, New York, pp. 371–379.
Muranushi, F., Tanaka, K., and Takeuchi, Y., 1993, “The Ultraviolet Light Interference Method to Measure Slider Flying Height,” Adv. Info. Storage Syst., 5 , ASME Press, New York, pp. 435–445.
Mcmillan,  T. C., and Talke,  F. E., 1994, “Ultra Low Flying Height Measurements Using Monochromatic and Phase Demodulated Laser Interferometry,” IEEE Trans. Magn., 30(6), pp. 4173–4175.
Li,  Y., Menon,  A., and Goglia,  P., 1996, “Evaluations of Diamond-Like-Carbon Film Optical Constants and Their Effects on Flying Height Determination,” ASME J. Tribol., 118(4), pp. 767–773.
Li,  Y., 1997, “Flying Height Measurement on Al2O3 Film of a Magnetic Slider,” ASME J. Tribol., 119(4), pp. 681–686.
Groot,  P., Deck,  L., Sooditsky,  J., and Biegen,  J., 1996, “Polarization Interferometer for Measuring the Flying Height of Magnetic Read-Write Heads,” Opt. Lett., 21(6), pp. 441–443.
Mitsuya,  Y., and Ohshima,  Y., 2001, “Error Analysis of Head-Disk Spacing Measurements Made by Using Optical Interferometry,” ASME J. Tribol., 133(2), pp. 358–363.
Mitsuya,  Y., Mitsui,  A., Kawabe,  Y., and Lunde,  L., 1996, “Three-Dimensional Measurement of Head Flying Height and Attitude Using Image Processing of Fringe Patterns Formed by Michelson Laser Interferometry,” ASME J. Tribol., 118(3), pp. 564–570.
Mitsuya, Y., Yoshioka, M., and Nakayama, K., 1998, “Head-Medium Spacing Measurements Using a Phase Comparison Between Two Fringe Patterns Formed by Michelson Laser Interferometry Through a Glass Disk,” Adv. Info. Storage Syst., 9 , ASME Press, New York, pp. 63–75.
Mitsuya,  Y., Chihara,  K., and Nakayama,  K., 1999, “Novel Measurements of Flying Height and Attitudes Using Michelson Laser Interferometry,” IEEE Trans. Magn., 35(5), pp. 2338–2340.

Figures

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Principle of Michelson Interferometry through glass disk
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Fringe parameters and image areas captured on CCD
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Optical system and experimental apparatus
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Multiple image processing: (a) original image, (b) after median filtering, (c) after spatial filtering, (d) after ridgeline extraction, and (e) after straightening
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Reproducibility in driving reference mirror for fringe interval
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Wobbling technique to capture fringe image lying at a prescribed position
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Suppression of spacing fluctuation by reducing window width
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Experimental slider configuration
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Stratified structure of slider surface
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Multiple interferences considering stratified structure between slider and disk
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Calculated corrections of phase shift: (a) Effects of Si underlayer and (b) Effects of DLC overcoat
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Comparisons between measurements and calculations

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