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TECHNICAL PAPERS

A Model for Temperature Rise of Polishing Process Considering Effects of Polishing Pad and Abrasive

[+] Author and Article Information
Jeng-Haur Horng

Department of Power Mechanical Engineering, National Huwei Institute of Technology, Huwei, Yunlin 632, Taiwan

Yeau-Ren Jeng, Chun-Liang Chen

Department of Mechanical Engineering, National Chung Cheng University, Chia-Yi, Taiwan

J. Tribol 126(3), 422-429 (Jun 28, 2004) (8 pages) doi:10.1115/1.1705665 History: Received January 28, 2003; Revised September 18, 2003; Online June 28, 2004
Copyright © 2004 by ASME
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References

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Figures

Grahic Jump Location
Schematic diagram of the polishing process
Grahic Jump Location
Schematic diagram of the interaction between abrasive particles, workpiece and polishing pad
Grahic Jump Location
Effect of different workpiece and particle size for average contact temperature (Taw,ave)
Grahic Jump Location
Variation of contact force ratio of abrasive-workpiece and pad-workpeice with particle size for the different hardness of pad
Grahic Jump Location
Variation of maximum and average contact temperature rise of abrasive-workpiece (Taw,max and Taw,ave) with particle size for different polishing workpiece
Grahic Jump Location
Variation of maximum and average contact temperature rise of pad-workpiece (Tpw,max and Tpw,ave) with particle size for different polishing workpiece
Grahic Jump Location
Variation of maximum temperature rise of abrasive-workpiece (Taw,max) with particle size for the polishing of different hardness of pad
Grahic Jump Location
Variation of maximum temperature rise of pad-workpiece (Tpw,max) with particle size for the polishing of different workpiece and different hardness of pad
Grahic Jump Location
Variation of maximum and average contact temperature rise of abrasive-workpiece (Taw,max and Taw,ave) with particle density for the different polishing workpiece
Grahic Jump Location
Variation of maximum and average contact temperature rise of pad-workpiece (Tpw,max and Tpw,ave) with particle density for the polishing of different workpiece
Grahic Jump Location
Variation of contact force ratio of particles and pad with surface roughness
Grahic Jump Location
Variation of maximum and average contact temperature rise of abrasive-workpiece (Taw,max and Taw,ave) with surface roughness for the polishing of different workpiece
Grahic Jump Location
Variation of maximum and average contact temperature rise of pad-workpiece (Tpw,max and Tpw,ave) with surface roughness for the different polishing workpiece

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