Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects

[+] Author and Article Information
Bharat Bhushan, Huiwen Liu

Nanotribology Laboratory for Information, Storage and MEMS/NEMS, The Ohio State University, 206 W 18th Avenue, Columbus, OH 43210-1107

Stephen M. Hsu

National Institute of Standards and Technology, Gaithersburg, MD 20899

J. Tribol 126(3), 583-590 (Jun 28, 2004) (8 pages) doi:10.1115/1.1739407 History: Received August 06, 2003; Revised October 17, 2003; Online June 28, 2004
Copyright © 2004 by ASME
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Anonymous, 1997, Microelectromechanical Systems: Advanced Materials and Fabrication Methods, NMAB-483, National Academy Press, Washington, D.C.
Roukes,  M., 2001, “Nanoelectromechanical Systems Face the Future,” Phys. World, February, pp. 25–31.
Bhushan, B., ed., 1998, Tribology Issues and Opportunities in MEMS, Kluwer Academic, Dordrecht, Netherlands.
Tas,  N., Sonnenberg,  T., Jansen,  H., Legtenberg,  R., and Elwenspoek,  M., 1996, “Stiction in Surface Micromachining,” J. Micromech. Microeng., 6, pp. 385–397.
Maboudian,  R., and Howe,  R. T., 1997, “Critical Review: Adhesion of Surface Micromechanical Structures,” J. Vac. Sci. Technol. B, 15, pp. 1–20.
Bhushan, B., ed., 2004, Nanotechnology Handbook, Springer-Verlag, Heidelberg, Germany.
Mastrangelo, C. H., 1998, “Surface Forces Induced Failures in Microelectromechanical Systems,” in Tribology Issues and Opportunities in MEMS, B. Bhushan, ed., Kluwer Academic, Dordrecht, Netherlands, pp. 367–395.
de Boer,  M. P., and Mayer,  T. M., 2001, “Tribology of MEMS,” MRS Bull., 26, pp. 302–304.
Komvopoulos,  K., 2003, “Adhesion and Friction Forces in Microelectromechanical Systems: Mechanisms, Measurement, Surface Modification Techniques, and Adhesion Theory,” J. Adhes. Sci. Technol., 17, pp. 477–517.
Tanner, D. M., Smith, N. F., Irwin, L. W. et al., 2000, MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes, SAND2000-0091, Sandia National Laboratories, Albuquerque New Mexico (Download from www.prod.sandia.gov).
Bhushan, B., ed., 1999, Handbook of Micro/Nanotribology, second ed., CRC Press, Boca Raton, Florida, Chap. 1.
Liu,  H., and Bhushan,  B., 2003, “Adhesion and Friction Studies of Microelectromechanical Systems/Nanoelectromechanical Systems Materials Using a Novel Microtriboapparatus,” J. Vac. Sci. Technol. A, 21, pp. 1528–1538.
Bhushan,  B., and Liu,  H., 2001, “Nanotribological Properties and Mechanisms of Alkylthiol and Biphenyl Thiol Self-Assembled Monolayers Studied by AFM,” Phys. Rev. B, 63, pp. 2454 12:1–11.
Liu,  H., and Bhushan,  B., 2002, “Investigation of Nanotribological Properties of Self-Assembled Monolayers With Alkyl and Biphenyl Spacer Chains,” Ultramicroscopy, 91, pp. 185–202.
Liu,  H., and Bhushan,  B., 2003, “Nanotribological Characterization of Molecularly-Thick Lubricant Films for Applications to MEMS/NEMS by AFM,” Ultramicroscopy, 97, pp. 321–340.
Bhushan, B., 1996, Tribology and Mechanics of Magnetic Storage Devices, second ed., Springer-Verlag, New York.
Chilamakuri,  S. K., and Bhushan,  B., 1999, “A Comprehensive Kinetic Meniscus Model for Prediction of Long-Term Static Friction,” J. Appl. Phys., 86, pp. 4649–4656.
Bhushan, B., 2002, Introduction to Tribology, Wiley, New York.
Stifter,  T., Marti,  O., and Bhushan,  B., 2000, “Theoretical Investigation of the Distance Dependence of Capillary and van der Waals Forces in Scanning Force Microscopy,” Phys. Rev. B, 62, pp. 13 667–13 673.
Mizuhara, K., and Hsu, S. M., 1992, “Tribochemical Reaction of Oxygen and Water on Silicon Surfaces,” in Wear Particles, D. Dowson et al, eds., Elsevier Science Publishers, Amsterdam, Netherlands, pp. 323–328.
Lide, D. R., 1994, CRC Handbook of Chemistry and Physics, CRC Press, Boca Raton, FL, Chap. 6.
Bhushan,  B., and Sundararajan,  S., 1998, “Micro/Nanoscale Friction and Wear Mechanisms of Thin Films Using Atomic Force and Friction Force Microscopy,” Acta Mater., 46, pp. 3793–3804.
Bhushan,  B., and Dandavate,  C., 2000, “Thin-Film Friction and Adhesion Studies Using Atomic Force Microscopy,” J. Appl. Phys., 87, pp. 1201–1210.
Bhushan,  B., and Venkatesan,  S., 1993, “Mechanical and Tribological Properties of Silicon for Micromechanical Applications: A Review,” Adv. Inf. Storage Syst., 5, pp. 211–239.
Anonymous, 1988, Properties of Silicon, EMIS Data Reviews Series No. 4. INSPEC, Institution of Electrical Engineers, London (see also, Anonymous, MEMS Materials Database, 2002, http://www.memsnet.org/material/).
Bhushan, B., and Gupta, B. K., 1991, Handbook of Tribology: Materials, Coatings, and Surface Treatments, McGraw-Hill, New York.
Bhushan,  B., 1999, “Chemical, Mechanical and Tribological Characterization of Ultra-Thin and Hard Amorphous Carbon Coatings as Thin as 3.5 nm: Recent Developments,” Diamond Relat. Mater., 8, pp. 1985–2015.
Ruan,  J., and Bhushan,  B., 1994, “Atomic-Scale Friction Measurements Using Friction Force Microscopy: Part I—General Principles and New Measurement Techniques,” ASME J. Tribol., 116, pp. 378–388.
Bhushan,  B., and Koinkar,  V. N., 1994, “Nanoindentation Hardness Measurements Using Atomic Force Microscopy,” Appl. Phys. Lett., 64, pp. 1653–1655.
Bhushan,  B., Israelachvili,  J. N., and Landman,  U., 1995, “Nanotribology: Friction, Wear, and Lubrication at the Atomic Scale,” Nature (London), 374, pp. 607–616.
Bhushan,  B., Kulkarni,  A. V., Bonin,  W., and Wyrobek,  J. T., 1996, “Nano/Picoindentation Measurements Using a Capacitive Transducer System in Atomic Force Microscopy,” Philos. Mag., 74, pp. 1117–1128.
Bhushan,  B., and Kulkarni,  A. V., 1996, “Effect of Normal Load on Microscale Friction Measurements,” Thin Solid Films, 278, pp. 49–56; erratum: 293 , p. 333.


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(a) The influence of rest time on the adhesive force of Si(100), DLC, chemically bonded Z-DOL, and HDT, and (b) single asperity contact modeling results of the rest time effect on the meniscus force for an asperity of R in contact with a flat surface with a water film thickness of h0 and absolute velocity of η 17
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(a) Adhesive forces of Si(100), DLC, chemically bonded Z-DOL, and HDT at ambient condition and the contact angle values and the calculated Laplace values, and (b) a schematic showing the relative size of water meniscus on different specimens
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Variation of friction force as a function of normal load curves obtained on Si(100), DLC, chemically bonded Z-DOL, and HDT, and coefficient of friction (μ) values
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The influence of sliding velocity on the friction forces of Si(100), DLC, chemically-bonded Z-DOL, and HDT
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The influence of relative humidity on the adhesive and friction forces of Si(100), DLC, chemically-bonded Z-DOL, and HDT
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The influence of temperature on the adhesive and friction forces of Si(100), DLC, chemically bonded Z-DOL, and HDT
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Adhesive force and coefficient of friction as a function of tip radius at several humidities and as a function of relative humidity at several tip radii on Si(100) (Bhushan and Sundararajan 22)
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Coefficient of friction as a function of normal load and corresponding wear depth as a function of normal load for silicon, SIO2 coatings, and natural diamond. Inflections in the curves for silicon and SiO2 correspond to the contact stresses equal to the hardness of these materials (Bhushan and Kulkarni 29).




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