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RESEARCH PAPERS

Direct Visualization of Molecularly Thin Lubricant Films on Magnetic Disks by Ellipsometric Microscopy With a White Light Source

[+] Author and Article Information
Kenji Fukuzawa, Akira Nakada, Yasunaga Mitsuya

Hedong Zhang

School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

J. Tribol 126(4), 755-760 (Nov 09, 2004) (6 pages) doi:10.1115/1.1792694 History: Received February 23, 2004; Revised April 27, 2004; Online November 09, 2004
Copyright © 2004 by ASME
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References

Figures

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Schematic of ellipsometric microscope
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Differential processing in differential ellipsometric microscope: (a) image when uncovered substrate region is set to dark, (b) image when film-covered region is set to dark, (c) image of (b) subtracted from (a)
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Relationship between wavelength and refractive index of lubricant (FOMBLIN-ZDOL2000)
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Relationship between wavelength and difference in phase shift. Wavelength is plotted in terms of difference from wavelength of 632.8 nm.
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Relationship between wavelength width and thickness resolution
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Image of thin lubricant film: (a) Raw image for 10 nm thick film obtained using laser-based ellipsometric microscope. Bright region is image of thin film. (b) Image of 4 nm thick film obtained using white-light-source differential ellipsometric microscope. Scale bar is 500 μm.
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Intensity profile for 4 nm thick film obtained by differential ellipsometric microscope with laser light source
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Intensity profile for 3.2 nm thick film obtained by differential ellipsometric microscope with white light source and thickness profile measured with commercially available scanning ellipsometer

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