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RESEARCH PAPERS

Extracting Summit Roughness Parameters From Random Gaussian Surfaces Accounting for Asymmetry of the Summit Heights

[+] Author and Article Information
Ning Yu, Andreas A. Polycarpou

Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801

J. Tribol 126(4), 761-766 (Nov 09, 2004) (6 pages) doi:10.1115/1.1792698 History: Received February 23, 2004; Revised May 25, 2004; Online November 09, 2004
Copyright © 2004 by ASME
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References

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Yu,  N., and Polycarpou,  A. A., 2002, “Contact of Rough Surfaces with Asymmetric Distribution of Asperity Heights,” ASME J. Tribol., 124, pp. 367–376.
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Suh,  A. Y., and Polycarpou,  A. A., 2003, “Adhesive and Pull-Off Forces for Polysilicon MEMS Surfaces Using the sub-Boundary Lubrication Model,” ASME J. Tribol., 125, pp. 193–199.
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Figures

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Schematic of a rough surface depicting surface and summit heights
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Probability density of summit heights 3
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Analytical prediction of skewness and kurtosis of summit heights
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Typical 3D numerically generated surface with λ=300 nm(α=2.359,Rq=1 nm)
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Bandwidth parameter as a function of correlation length (sampling interval=0.1 μm)
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Comparison of summit density obtained by its definition [Eq. (15)] and as predicted by the spectrum moments approach [Eq. (6)]
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Comparison of summit radius obtained by its definition [Eq. (16)] and as predicted by the spectrum moments approach [Eq. (7)]
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Comparison of skewness of summit heights obtained by its definition [Eq. (19)] and as predicted by the spectrum moments approach [Eq. (10)]
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Comparison of kurtosis of summit heights obtained by its definition [Eq. (20)] and as predicted by the spectrum moments approach [Eq. (11)]
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Variation of the static friction coefficient with external normal load for the case of contact between a MEMS deposited polysilicon surface on itself

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