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TECHNICAL PAPERS

Tilt and Interfacial Fluid Pressure Measurements of a Disk Sliding on a Polymeric Pad

[+] Author and Article Information
Sum Huan Ng, Inho Yoon, Andrés Osorno, Steven Danyluk

George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332

Len Borucki

Intelligent Planar, Mesa, AZ 85205

C. Fred Higgs

Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213

J. Tribol 127(1), 198-205 (Feb 07, 2005) (8 pages) doi:10.1115/1.1829718 History: Received February 25, 2004; Revised May 28, 2004; Online February 07, 2005
Copyright © 2005 by ASME
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References

Figures

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Pressure measurement disk
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Experimental layout for pressure mapping
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Pressure maps from experiment (colorbar units in kPa)
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Sensors layout and side view of disk tilt setup
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Definition of the tilt angles
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Speed and load effect on ϕ, θ, dz
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Flowchart for computation
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Pressure maps from model
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Effect on ϕ, θ, dz using wafer carrier
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Details of wafer carrier for wafer bending experiments
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Layouts for dynamic wafer bending experiments
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Contact pressure from model (x,y-axes in meters)

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