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Research Papers: Hydrodynamic Lubrication

Impulse-Load Dynamics of Squeeze Film Gas Bearings for a Linear Motion Guide

[+] Author and Article Information
Yuji Ono

Department of Mechanical Engineering, Tokyo University of Science, 1-14-6 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japan

Shigeka Yoshimoto1

Department of Mechanical Engineering, Tokyo University of Science, 1-14-6 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japanyosimoto@rs.kagu.tus.ac.jp

Masaaki Miyatake

Department of Mechanical Engineering, Tokyo University of Science, 1-14-6 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japanmiyatake@rs.kagu.tus.ac.jp

1

Corresponding author.

J. Tribol 131(4), 041706 (Sep 23, 2009) (6 pages) doi:10.1115/1.3201894 History: Received January 27, 2009; Revised July 10, 2009; Published September 23, 2009

This paper deals with a noncontact moving table using squeeze-film gas bearings for a linear motion guide, and investigates the dynamic behavior of the moving table under impulse load, experimentally and numerically, to clarify the dynamic characteristics of a squeeze-film gas bearing. This squeeze bearing for a noncontact moving table uses piezoelectric actuators as an ultrasonic vibrator to make the bearing surface vibrate at the ultrasonic resonant frequency of the bearing plate. The squeeze-film pressure is generated in the gap beneath the vibrating bearing surface and can support the moving table without any contact. It was consequently found that the numerical calculation method presented in this paper could predict well the dynamic behavior of the moving table using the squeeze-film gas bearing under impulse load.

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Copyright © 2009 by American Society of Mechanical Engineers
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Figures

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Figure 1

Schematic view of a linear guideway system using squeeze-film gas bearings vibrating at ultrasonic resonant frequency

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Figure 2

Schematic views of a squeeze-film gas bearing plate and a moving table

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Figure 3

Measuring method of the amplitudes of vibration of the bearing plate and measured amplitudes of vibration

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Figure 4

Experimental vibrational mode shape of the bearing plate

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Figure 5

Numerical vibrational mode shape of the bearing plate

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Figure 6

Numerical model for calculating the stiffness of a cantilever beam, kc

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Figure 7

Vibration model of a moving table using squeeze-film bearings

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Figure 8

Experimental apparatus for measuring the impulse response of the squeeze-film bearing

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Figure 9

Relationship between averaged floating height and input voltage

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Figure 10

Effects of Vamp on the impulse response of the moving table

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Figure 11

Averaged dimensionless pressure in the gap and the average mass flow rate at the bearings edges

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Figure 12

Relationship between input voltage and static and approximated dynamic stiffness

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Figure 13

Relationship between averaged floating height and total mass of a moving table

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Figure 14

Effects of total mass of a moving table on the impulse response

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