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Research Papers

Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures

[+] Author and Article Information
C. Tomastik

e-mail: tomastik@ac2t.at

A. Pauschitz

Austrian Centre of Competence for Tribology,
Viktor-Kaplan-Strasse 2,
Wiener Neustadt, 2700, Austria

M. Roy

Defence Metallurgical Research Laboratory,
PO Kanchanbagh,
Hyderabad, 500 058, India

1Corresponding author.

Contributed by the Tribology Division of ASME for publication in the JOURNAL OF TRIBOLOGY. Manuscript received January 30, 2012; final manuscript received July 24, 2012; published online December 20, 2012. Assoc. Editor: Hong Liang.

J. Tribol 135(1), 011001 (Dec 20, 2012) (9 pages) Paper No: TRIB-12-1017; doi: 10.1115/1.4007537 History: Received January 30, 2012; Revised July 24, 2012

Tungsten sulfide is a transition metal dichalcogenide (TMD) with excellent self-lubricating properties, and a potential candidate for coatings for MEMS applications. Its mechanical and tribological properties can be further improved by alloying it with carbon (W-S-C films). These films are commonly manufactured by sputter deposition. The present work investigates the influence of sputtering procedure on the microtribological performance of W-S-C films. For this purpose, carbon was incorporated in the films via three different ways: (1) by using a reactive gas (CH4); (2) by co-sputtering from two separate targets (WS2 and C); and (3) by sputtering from a composite target of graphite embedded with WS2 pellets. The films were characterized with scanning electron microscopy (SEM), nanoindentation, atomic force microscopy (AFM), and micro-Raman spectroscopy (RS). Reciprocating wear tests were performed on a microtribometer with steel balls as counterbodies. The worn surfaces were investigated with white light confocal microscopy, RS, and X-ray photoelectron spectroscopy (XPS). The results show that the total wear decreases with the hardness of the investigated films and increases with applied load of the tribological test. The friction coefficient at higher load is governed by the roughness of the films. At low load, the presence of graphitic carbon determines the friction coefficient. No transfer of material from the counteracting body is observed.

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References

Singer, I. L., Fayeulle, S., and Ehni, P. D., 1996, “Wear Behavior of Triode-Sputtered MoS2 Coatings in Dry Sliding Contact With Steel and Ceramics,” Wear, 195(1–2), pp. 7–20. [CrossRef]
Renevier, N. M., Lobiondo, N., Fox, V. C., Teer, D. G., and Hampshire, J., 2000, “Performance of MoS2/Metal Composite Coatings Used for Dry Machining and Other Industrial Applications,” Surf. Coat. Technol., 123(1), pp. 84–91. [CrossRef]
Briscoe, H. M., 1990, “Why Space Tribology?,” Tribol. Int., 23(2), pp. 67–74. [CrossRef]
Spalvins, T., 1974, “Structure of Sputtered Molybdenum Disulfide Films at Various Substrate Temperatures,” ASLE Trans., 17(1), pp. 1–7. [CrossRef]
Wahl, K. J., and Singer, I. L., 1995, “Quantification of a Lubricant Transfer Process That Enhances the Sliding Life of a MoS2 Coating,” Tribol. Lett., 1(1), pp. 59–66. [CrossRef]
Fleischauer, P. D., and Bauer, R., 1988, “Chemical and Structural Effects on the Lubrication Properties of Sputtered MoS2 Films,” Tribol. Trans., 31(2), pp. 239–250. [CrossRef]
Singer, I. L., 1996, “Mechanics and Chemistry of Solids in Sliding Contact,” Langmuir, 12(19), pp. 4486–4491. [CrossRef]
Lauwerens, W., Wang, J., Navratil, J., Wieers, E., Chaen, J., and Stals, L. M., 2000, “Humidity Resistant MoS(x) Films Prepared by Pulsed Magnetron Sputtering,” Surf. Coat. Technol., 131(1–3), pp. 216–221. [CrossRef]
Zhang, X., Vitchev, R. G., Laurens, W., Stals, L. M., He, J., and Celis, J. P., 2001, “Effect of Crystallographic Orientation on Fretting Wear Behaviour of MoSx Coatings in Dry and Humid Air,” Thin Solid Films, 396(1–2), pp. 69–77. [CrossRef]
Hilton, M. R., Bauer, R., and Fleischauer, P. D., 1990, “Tribological Performance and Deformation of Sputter-Deposited MoS2 Solid Lubricant Films During Sliding Wear and Indentation Contact,” Thin Solid Films, 188(2), pp. 219–236. [CrossRef]
Seitzman, L. E., Bolster, R. N., Singer, I. L., and Wegand, J. C., 1995, “Relationship of Endurance to Microstructure of IBAD MoS2 Coatings,” Tribol. Trans., 38(2), pp. 445–451. [CrossRef]
Shtansky, D. V., Lobova, T. A., Fominski, V. Yu., Kulinich, S. A., Lyasotsky, I. V., Petzhik, M. I., Levashov, E. A., and Moore, J. J., 2004, “Structure and Tribological Properties of WSex, WSex/TiN, WSex/TiCN and WSex/TiSiN Coatings,” Surf. Coat. Technol., 183(2–3), pp. 328–336. [CrossRef]
Watanabe, S., Noshiro, J., and Miyake, S., 2004, “Tribological Characteristics of WS2/MoS2 Solid Lubricating Multilayer Films,” Surf. Coat. Technol., 183(2–3), pp. 347–351. [CrossRef]
Kubart, T., Polcar, T., Kopecky, L., Novak, R., and Novakova, D., 2005, “Temperature Dependence of Tribological Properties of MoS2 and MoSe2 Coatings,” Surf. Coat. Technol., 193(1–3 Spec. Iss.), pp. 230–233. [CrossRef]
Nossa, A., and Cavaleiro, A., 2001, “The Influence of the Addition of C and N on the Wear Behaviour of W-S-C/N Coatings,” Surf. Coat. Technol., 142–144, pp. 984–991. [CrossRef]
Nossa, A., and Cavaleiro, A., 2003, “Mechanical Behaviour of W-S-N and W-S-C Sputtered Coatings Deposited With a Ti Interlayer,” Surf. Coat. Technol., 163–164, pp. 552–560. [CrossRef]
Sumomogi, T., Hieda, K., Endo, T., and Kuwahara, K., 1998, “Influence of Atmosphere Humidity on Tribological Properties in Scanning Probe Microscope Observation,” Appl. Phys. A, 66(Suppl. 1), pp. 299–303. [CrossRef]
Santos, L. V., Trava-Airoldi, V. J., Iha, K., Corat, E. J., and Salvatori, M. C., 2001, “Diamond-Like-Carbon and Molybdenum Disulfide Nanotribology Studies Using Atomic Force Measurements,” Diam. Rel. Mater., 10(3–7), pp. 1049–1052. [CrossRef]
Sheehan, P. E., and Lieber, C. M., 1996, “Nanotribology and Nanofabrication of MoO3 Structures by Atomic Force Microscopy,” Science, 272(5265), pp. 1158–1161. [CrossRef] [PubMed]
Kim, Y., Huang, J. L., and Lieber, C. M., 1991, “Characterization of Nanometer Scale Wear and Oxidation of Transition Metal Dichalcogenide Lubricants by Atomic Force Microscopy,” Appl. Phys. Lett., 59(26), pp. 3404–3406. [CrossRef]
Tomala, A., Pauschitz, A., Roy, M., Evaristo, M., and Cavaleiro, A., 2011, “Influence of Carbon Content on the Nanotribology of W-S-C Films,” Int. J. Surf. Sci. Eng., 5(1), pp. 3–19. [CrossRef]
Cohen, S. R., Feldman, Y., Cohen, H., and Tenne, R., 1999, “Nanotribology of Novel Metal Dichalcogenides,” Appl. Surf. Sci., 144–145, pp. 603–607. [CrossRef]
Zhang, X., and Celis, J. P., 2003, “Nanotribology of MoSx Coatings Investigated by Oscillating lateral Force Microscopy,” Appl. Surf. Sci., 206(1–4), pp. 110–118. [CrossRef]
Nossa, A., and Cavalerio, A., 2004, “Chemical and Physical Characterization of C(N)-Doped W-S Sputtered Films,” J. Mater. Res., 19(8), pp. 2356–2365. [CrossRef]
Koch, T., Evaristo, M., Pauschitz, A., Roy, M., and Cavaleiro, A., 2009, “Nanoindentation and Nanoscratch Behaviour of Reactive Sputtered Deposited W-S-C Film,” Thin Solid Films, 518(1), pp. 185–193. [CrossRef]
Roy, M., Koch, T., and Pauschitz, A., 2010, “The Influence of Sputtering Procedure on Nanoindentation and Nanoscratch Behaviour of W-S-C Film,” Appl. Surf. Sci., 256(22), pp. 6850–6858. [CrossRef]
Oliver, W. C., and Pharr, G. M., 1992, “Improved Technique for Determining Hardness and Elastic Modulus Using Load and Displacement Sensing Indentation Experiments,” J. Mater. Res., 7(6), pp. 1564–1580. [CrossRef]
Knight, D. S., and White, W. B., 1989, “Characterization of Diamond Films by Raman Spectroscopy,” J. Mater. Res., 4(2), pp. 385–393. [CrossRef]
Okada, K., Kanda, K., Komatsu, S., and Matsumoto, S., 2000, “Effect of the Excitation Wavelength on Raman Scattering of Microcrystalline Diamond Prepared in a Low Pressure Inductively Coupled Plasma,” J. Appl. Phys., 88(3), pp. 1674–1678. [CrossRef]
Polcar, T., Evaristo, M., and Cavaleiro, A., 2007, “Comparative Study of the Tribological Behaviour of Self-Lubricating W-S-C and Mo-Se-C Sputtered Coatings,” Proc. Joint European Conference on Tribology, Slovenian Society for Tribology, Ljubljana, Slovenia, pp. 505–515.
Moulder, J. F., Stickel, W. F., Sobol, P. E., and Bomben, K. D., 1992, Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer Corp., Eden Prairie, MN.
Leezenberg, P., Johnston, W., and Tyndall, G., 2001, “Chemical Modification of Sputtered Amorphous-Carbon Surfaces,” J. Appl. Phys., 89(6), pp. 3498–3507. [CrossRef]
Sinha, S. K., Sirota, E. B., Garoff, S., and Stanley., H. B., 1988, “X-Ray and Neutron Scattering From Rough Surfaces,” Phys. Rev. B, 38(4), pp. 2297–2311. [CrossRef]
Hayward, I. P., Singer, I. L., and Seitzman, L. E., 1992, “Effect of Roughness on the Friction of Diamond on CVD Diamond Coatings,” Wear, 157(2), pp. 215–227. [CrossRef]
Prasad, S., and Zabinski, J., 1997, “Super Slippery Solids,” Nature, 387(6635), pp. 761–763. [CrossRef]
Tomala, A., Roy, M., and Franek, F., 2010, “Nanotribology of Mo-Se-C Films,” Philos. Mag., 90(29), pp. 3827–3843. [CrossRef]
Roy, M., 2006, Proc. Int. Conference on Advances in Materials and Materials Processing, Kharagpur, India, p. 202.
Bowden, F. P., and Tabor, D., 1964, The Friction and Lubrication of Solids, Part 2, Clarendon, Oxford.
Johnson, K. L., Kendall, K., and Roberts, A. D., 1971, “Surface Energy and the Contact of Elastic Solids,” Proc. R. Soc. London Ser. A, 324(1558), pp. 301–313. [CrossRef]
Horn, R. G., Israelachvili, J. N., and Pribac, F., 1987, “Measurement of the Deformation and Adhesion of Solids in Contact,” J. Colloid Interface Sci., 115(2), pp. 480–492. [CrossRef]
Hertz, H., 1881, “On the Contact of Elastic Solids,” J. Reine Angew. Math., 92, pp. 156–171. Translated and reprinted in English in “Hertz's Miscellaneous Papers,” Macmillan & Co., 1896, London, UK.
Bridgman, P. W., 1937, “Shearing Phenomena at High Pressure Particularly in Inorganic Compounds,” Proc. Am. Acad. Arts Sci., 71, p. 387. [CrossRef]

Figures

Grahic Jump Location
Fig. 1

Raman spectra obtained from the investigated films

Grahic Jump Location
Fig. 2

Deflection of the AFM cantilever tip as a function of the distance from the film surface for all three films: (a) reactively sputtered film, (b) film obtained by co-sputtering two targets, and (c) film obtained by sputtering a composite target

Grahic Jump Location
Fig. 3

The variation of the friction coefficient as a function of the number of cycles for all three films at different applied loads: (a) applied load = 200 mN, (b) applied load = 50 mN, and (c) applied load = 25 mN

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Fig. 4

Topographic images obtained by white light confocal microscopy of the investigated films: (a) reactively sputtered film, (b) film obtained by co-sputtering two targets, and (c) film obtained by sputtering a composite target

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Fig. 5

Total wear of the investigated films at different loads

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Fig. 6

Topographic images obtained using SPM from the worn surfaces of the investigated films: (a) reactively sputtered film, (b) film obtained by co-sputtering two targets, and (c) film obtained by sputtering a composite target

Grahic Jump Location
Fig. 7

Raman spectra obtained from the worn surfaces of the investigated films

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Fig. 8

XPS survey spectra obtained from the worn surfaces of the investigated films

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Fig. 9

XPS detail spectra of S, C, O, and W from the worn surface of the reactively sputtered film

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Fig. 10

Load dependence of the friction force for the films under microtribological test conditions

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