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Research Papers: Coatings and Solid Lubricants

Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition

[+] Author and Article Information
Nay Win Khun

School of Mechanical and Aerospace
Engineering,
Nanyang Technological University,
50 Nanyang Avenue,
Singapore 639798, Singapore

Anne Neville

School of Mechanical Engineering,
University of Leeds,
Leeds LS2 9JT, UK
e-mail: a.neville@leeds.ac.uk

Ivan Kolev

IHI Hauzer Techno Coating,
Venlo 5928 LL, The Netherlands

Hongyuan Zhao

School of Mechanical Engineering,
University of Leeds,
Leeds LS2 9JT, UK

Contributed by the Tribology Division of ASME for publication in the JOURNAL OF TRIBOLOGY. Manuscript received August 1, 2015; final manuscript received October 23, 2015; published online February 15, 2016. Assoc. Editor: Dae-Eun Kim.

J. Tribol 138(3), 031301 (Feb 15, 2016) (6 pages) Paper No: TRIB-15-1282; doi: 10.1115/1.4031995 History: Received August 01, 2015; Revised October 23, 2015

In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC films were deposited on the steel substrates with a tungsten carbide interlayer via μW-PECVD. The negative substrate bias used during the film deposition was varied. The Raman results revealed that the increased negative substrate bias increased the sp3 bonding in the DLC films as a result of the increased kinetic energy of film-forming ions during the film deposition. The tribological results clearly indicated that the friction and wear of the DLC-coated steel samples against a 100Cr6 steel ball significantly decreased with increased negative substrate bias due to the significantly improved wear resistance of the DLC films.

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Figures

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Fig. 1

Field-emission scanning electron microscopy (FESEM) micrographs showing surface morphologies of DLC films deposited with negative substrate biases of (a) −50, (b) −200, and (c) −300 V. The white arrows indicate the sizes of grains on the surface morphologies of DLC films.

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Fig. 2

SEM micrograph showing cross-sectional view of DLC film deposited with a negative substrate bias of −50 V

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Fig. 3

Raman spectra of DLC films deposited with different negative substrate biases

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Fig. 4

Results from Raman spectra of DLC films shown in Fig.3: (a) peak positions, (b) FWHMs, and (c) ID/IG ratios of D and G peaks

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Fig. 5

(a) Coefficients of friction of DLC films deposited with different negative substrate biases, slid against a 100Cr6 steel ball of 6 mm in diameter in a circular path of 1 mm in radius for 20,000 laps at a sliding speed of 1 cm/s under different normal loads. Coefficients of friction of the same samples, slid under normal loads of (b) 1 and (c) 4 N, as a function of the number of laps.

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Fig. 6

Wear widths and depths of DLC films deposited with different negative substrate biases, tested under the same conditions as described in Fig. 5

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Fig. 7

SEM micrographs showing surface morphologies of worn DLC films deposited with negative substrate biases of ((a) and (b)) −50 and ((c) and (d)) −300 V, slid against a 100Cr6 steel ball of 6 mm in diameter in a circular path of 1 mm in radius for 20,000 laps at a sliding speed of 1 cm/s under normal loads of ((a) and (c)) 1 and ((b) and (d)) 4 N

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Fig. 8

Energy-dispersive X-ray spectroscopy (EDX) spectra measured on DLC films deposited with negative substrate biases of ((a) and (b)) −50 and ((c) and (d)) −300 V, slid against a 100Cr6 steel ball of 6 mm in diameter in a circular path of 1 mm in radius for 20,000 laps at a sliding speed of 1 cm/s under a normal load of 4 N, at different locations of (a) A and (b) B in Fig. 7(b) and (c) C and (d) Din Fig. 7(d)

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