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Technical Brief

On the Planarization Mechanism and Pad Aging Effects of Soft Pad Polishing: A Perspective From the Micro-Mechanical Properties of Soft Pads

[+] Author and Article Information
Yeau-Ren Jeng

Department of Biomedical Engineering,
National Cheng Kung University,
No.1, University Road,
Tainan City 70101, Taiwan;
Department of Mechanical Engineering;Advanced Institute of Manufacturing with High-Tech Innovations,
National Chung Cheng University,
Chia-Yi 62102, Taiwan
e-mail: imeyrj@gs.ncku.edu.tw

Ping-Chi Tsai

Department of Mechanical Engineering;Advanced Institute of Manufacturing with High-Tech Innovations,
National Chung Cheng University,
Chia-Yi 62102, Taiwan
e-mail: pctsai@alum.ccu.edu.tw

Yu-Zheng Lin

Department of Mechanical Engineering;Advanced Institute of Manufacturing with High-Tech Innovations,
National Chung Cheng University,
Chia-Yi 62102, Taiwan
e-mail: imejsl@alum.ccu.edu.tw

1Corresponding author.

Contributed by the Tribology Division of ASME for publication in the Journal of Tribology. Manuscript received November 7, 2017; final manuscript received March 28, 2019; published online April 18, 2019. Assoc. Editor: Liming Chang.

J. Tribol 141(6), 064501 (Apr 18, 2019) (4 pages) Paper No: TRIB-17-1422; doi: 10.1115/1.4043348 History: Received November 07, 2017; Accepted March 28, 2019

The local viscoelastic properties of soft polishing pads with different usage durations are measured by a micro-scale mechanical analysis testing platform. The testing reveals stimulus-adaptive local viscoelasticity of soft pads under the activation of asperity contact. This phenomenon suggests asperity-dependent local modulus. Such an increase of local modulus induced by higher asperity provides a further enhancement effect to the planarization of surface asperity. Furthermore, the measurement outcomes suggest that the reaction of local micro-scale viscoelastic properties of the soft pad surface to the workpiece asperity will decay with usage time. The current study provides a detailed understanding of the aging effects for the soft pad and explains the performance decay during soft pad polishing from a local micro-scale interfacial perspective.

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References

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Figures

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Fig. 6

Variation of the storage modulus with dynamic loading under different usage durations

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Fig. 5

Variation of the storage modulus with dynamic loading under different static loading for pad usage duration of 15 h

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Fig. 4

Variation of the storage modulus with dynamic loading under different static loading for pad usage duration of 3 h

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Fig. 3

Variation of the storage modulus with dynamic loading under different static loading for pad usage duration of 0 h

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Fig. 2

Schematic view of the micro-scale dynamic mechanical analysis

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Fig. 1

Schematic diagram of the soft pad polishing platform

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