Structural and Compositional Characterization of RF Sputter-Deposited Ni-Cr + Cr2O3 Films

[+] Author and Article Information
Bharat Bhushan

Mechanical Technology Incorporated, Latham, New York 12110

J. of Lubrication Tech 103(2), 211-217 (Apr 01, 1981) (7 pages) doi:10.1115/1.3251632 History: Received February 27, 1980; Online November 17, 2009


An RF-sputtered chrome oxide coating with metallic binders was developed. The chrome oxide coating has high-temperature capabilities and is wear resistant, and has some self-lubricating properties. A nichrome metallic binder was added in the coating to improve its ductility without significant loss in the hardness. The sputtering parameters were optimized to obtain a smooth coating with the maximum adherence. The coatings were applied using bias-sputter and sputter-deposit modes on the heat treated and annealed foil substrates. The coating applied on annealed foils using the sputter-deposit mode was smooth and had the best adherence. Metallurgical examinations showed that the coating was Ni-Cr + Cr2 O3 . The coating as applied was amorphous and it crystallized during substrate heat treatment.

Copyright © 1981 by ASME
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