The Seal System in Aerostatic Journal Bearings for High Vacuum Chambers

[+] Author and Article Information
S. Yoshimoto, Y. Yoshida, K. Yagi

Tokyo University of Science, Department of Mechanical Engineering, 1-3 Kagurazaka Shinjuku-ku, Tokyo 162-8601, Japan

J. Tribol 126(2), 310-315 (Apr 19, 2004) (6 pages) doi:10.1115/1.1611498 History: Received March 21, 2003; Revised July 11, 2003; Online April 19, 2004
Copyright © 2004 by ASME
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Structure of a vacuum chamber installed with a rotational spindle supported by an aerostatic journal bearing with seal system
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Geometrical configurations of two-stage and three-stage seal systems
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Numerical results of Q(D) and fitted curve
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Comparison of pressure distributions between two-stage and three-stage seal systems
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Effect of seal gap on the vacuum chamber pressure
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Effect of seal length on the pressure distribution
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Effect of leakage and outgassing rates on the vacuum chamber pressure
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Experimental apparatus for measuring the leakage and outgassing rates
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Relationship between vacuum chamber pressure and elapsed time for pumping



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