Three-Dimensional Dry/Wet Contact Analysis of Multilayered Elastic/Plastic Solids With Rough Surfaces

[+] Author and Article Information
Shaobiao Cai

Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM), 650 Ackerman Road, Suite 255, The Ohio State University, Columbus, OH 43202-1107

Bharat Bhushan1

Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM), 650 Ackerman Road, Suite 255, The Ohio State University, Columbus, OH 43202-1107


Corresponding author; e-mail: Bhushan.2@osu.edu; Tel: 1-614-292 0651; Fax: 614 292 0325.

J. Tribol 128(1), 18-31 (Aug 18, 2005) (14 pages) doi:10.1115/1.2114947 History: Received March 09, 2005; Revised August 18, 2005

Friction/stiction and wear are among the main issues in microelectromechanical systems (MEMS/NEMS) devices having contact interfaces. Relevant parameters, i.e., layers thickness, need to be optimized. The contact analyses of multilayered structure under both dry and wet conditions are necessary to optimize these parameters. This study presents a first attempt to perform three-dimensional contact analysis of multilayered solids with rough surfaces in both dry and wet conditions. The surface displacements and contact pressure distributions are obtained based on variational principle with fast Fourier transform scheme. The effective hardness is modeled and plays a role when the local displacement meets the maximum displacement criterion. Simulations are performed to obtain the contact pressures, fractional total contact area, fractional plastic contact area, surface/subsurface stresses. Relative meniscus forces are obtained with the presence of an ultrathin liquid film for different loads and layers properties. These contact statistics and meniscus forces are analyzed to study the effects of layer-to-substrate ratios of stiffness and hardness, and the layers thickness of rough, two-layered elastic/plastic solids. The methods to decrease friction/stiction and wear are investigated, and the optimum layer parameters are identified.

Copyright © 2006 by American Society of Mechanical Engineers
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Figure 1

Schematics of (a) 3D profiles of two rough surfaces in contact with one with two layers and (b) top view of contact regions

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Figure 2

Schematic of a rough surface in contact with a smooth surface in the presence of a liquid film

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Figure 3

Surface height maps of computer generated rough surface

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Figure 8

Variation of relative meniscus force with normal pressure pn for σ=1nm, β*=0.5μm, H3∕E3=0.05 at different values of (a) E1∕E3, E2∕E3 for h1∕σ=h2∕σ=10 and h1∕σ=h2∕σ=1 with H1=H2=H3, E3=100GPa, (b) H1∕H3, H2∕H3 for three homogeneous cases and h1∕σ=h2∕σ=1 with E1=E2=E3=100GPa.



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