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Journal Articles

Scalable Au Metal-Assisted Chemical Etch Nanopatterning Using Enhanced Metal Break Techniques

Mark Hrdy, Akhila Mallavarapu, Mariana Castañeda, Paras Ajay, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2023, 11(1): 011005.
Paper No: JMNM-23-1037
https://doi.org/10.1115/1.4064611
Published Online: February 15, 2024
View Article titled, Scalable Au Metal-Assisted Chemical Etch Nanopatterning Using Enhanced Metal Break Techniques
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Topics: Metals, Etching
Journal Articles

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Raul M. Lema Galindo, Paras Ajay, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2022, 10(3): 031001.
Paper No: JMNM-22-1035
https://doi.org/10.1115/1.4062167
Published Online: April 3, 2023
View Article titled, Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch
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Topics: Catalysts, Etching, Metals, Silicon, Nanoscale phenomena
Includes: Supplementary data
Journal Articles

Optical Metrology of Critical Dimensions in Large-Area Nanostructure Arrays With Complex Patterns

Ramin Sabbagh, Alec Stothert, S. V. Sreenivasan, Dragan Djurdjanovic
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2023, 145(6): 061010.
Paper No: MANU-22-1619
https://doi.org/10.1115/1.4056923
Published Online: March 14, 2023
View Article titled, Optical Metrology of Critical Dimensions in Large-Area Nanostructure Arrays With Complex Patterns
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Topics: Dimensions, Gages, Inspection, Inverse problems, Metrology, Reflectance, Semiconductor wafers, Spectra (Spectroscopy), Optimization, Simulation
Journal Articles

Metal Assisted Chemical Etch of Polycrystalline Silicon

Crystal Barrera, Paras Ajay, Akhila Mallavarapu, Mark Hrdy, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021002.
Paper No: JMNM-22-1020
https://doi.org/10.1115/1.4055401
Published Online: September 27, 2022
View Article titled, Metal Assisted Chemical Etch of Polycrystalline Silicon
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Topics: Polysilicon, Metals, Columns (Structural), Etching, Silicon
Proceedings Papers

A Procedure to Determine Equilibrium Postural Configurations for Arbitrary Locations of the Feet

L. Javier Gonzalez, S. V. Sreenivasan
Proc. ASME. IMECE97, Advances in Bioengineering, 353-354, November 16–21, 1997
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1997-0369
https://doi.org/10.1115/IMECE1997-0369
View Paper titled, A Procedure to Determine Equilibrium Postural Configurations for Arbitrary Locations of the Feet
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Topics: Equilibrium (Physics), Machinery, Rehabilitation devices, Robotics
Proceedings Papers

A Drift-Free Navigation System for a Mobile Robotic Vehicle Operating on Unstructured Terrain

S. V. Sreenivasan, Kenneth J. Waldron
Proc. ASME. DETC92, 22nd Biennial Mechanisms Conference: Robotics, Spatial Mechanisms, and Mechanical Systems, 413-422, September 13–16, 1992
Publisher: American Society of Mechanical Engineers
Paper No: DETC1992-0241
https://doi.org/10.1115/DETC1992-0241
View Paper titled, A Drift-Free Navigation System for a Mobile Robotic Vehicle Operating on Unstructured Terrain
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Topics: Navigation, Robotic vehicles, Vehicles, Degrees of freedom, Errors, Robotics
Proceedings Papers

Solution of the Direct Position Kinematics Problem of the General Stewart Platform Using Advanced Polynomial Continuation

S. V. Sreenivasan, Prabjot Nanua
Proc. ASME. DETC92, 22nd Biennial Mechanisms Conference: Robotics, Spatial Mechanisms, and Mechanical Systems, 99-106, September 13–16, 1992
Publisher: American Society of Mechanical Engineers
Paper No: DETC1992-0203
https://doi.org/10.1115/DETC1992-0203
View Paper titled, Solution of the Direct Position Kinematics Problem of the General Stewart Platform Using Advanced Polynomial Continuation
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Topics: Kinematics, Polynomials, Algorithms, Geometry
Proceedings Papers

A Study of the Position Problem for Multi-Circuit Mechanisms

Kenneth J. Waldron, S. V. Sreenivasan
Proc. ASME. DETC94, 23rd Biennial Mechanisms Conference: Mechanism Synthesis and Analysis, 337-348, September 11–14, 1994
Publisher: American Society of Mechanical Engineers
Paper No: DETC1994-0212
https://doi.org/10.1115/DETC1994-0212
View Paper titled, A Study of the Position Problem for Multi-Circuit Mechanisms
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Topics: Circuits, Errors, Kinematics
Proceedings Papers

Globally Optimal Force Allocation in Active Mechanisms With Four Frictional Contacts

S. V. Sreenivasan, K. J. Waldron, S. Mukherjee
Proc. ASME. DETC94, 23rd Biennial Mechanisms Conference: Robotics — Kinematics, Dynamics and Controls, 63-72, September 11–14, 1994
Publisher: American Society of Mechanical Engineers
Paper No: DETC1994-0307
https://doi.org/10.1115/DETC1994-0307
View Paper titled, Globally Optimal Force Allocation in Active Mechanisms With Four Frictional Contacts
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Topics: Algorithms, Control equipment, Degrees of freedom, Grippers, Optimization, Performance characterization, Polynomials, Redundancy (Engineering), Vehicles
Proceedings Papers

Displacement Analysis of an Articulated Wheeled Vehicle Configuration on Uneven Terrain

S. V. Sreenivasan, K. J. Waldron
Proc. ASME. DETC94, 23rd Biennial Mechanisms Conference: Robotics — Kinematics, Dynamics and Controls, 393-402, September 11–14, 1994
Publisher: American Society of Mechanical Engineers
Paper No: DETC1994-0348
https://doi.org/10.1115/DETC1994-0348
View Paper titled, Displacement Analysis of an Articulated Wheeled Vehicle Configuration on Uneven Terrain
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Topics: Displacement, Vehicles, Chain, Polynomials, Geometry, Kinematics, Mechanical admittance, Stability
Journal Articles

Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays

Brian Gawlik, Ariel R. Barr, Akhila Mallavarapu, Edward T. Yu, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010904.
Paper No: JMNM-20-1008
https://doi.org/10.1115/1.4049959
Published Online: February 26, 2021
View Article titled, Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays
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Topics: Computers, Delays, Etching, Flaw detection, Glass, Imaging, Manufacturing, Particulate matter, Root cause analysis, Semiconductor wafers
Proceedings Papers

Force Distribution Characteristics of Actively Reconfigurable Wheeled Vehicle Systems

S. V. Sreenivasan, P. Nanua
Proc. ASME. DETC-CIE96, Volume 2B: 24th Biennial Mechanisms Conference, V02BT02A022, August 18–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: 96-DETC/MECH-1138
https://doi.org/10.1115/96-DETC/MECH-1138
View Paper titled, Force Distribution Characteristics of Actively Reconfigurable Wheeled Vehicle Systems
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Topics: Vehicles, Kinematics, Mathematics, Mobile robots, Motion control, Space
Proceedings Papers

Kinematic Geometry of Wheeled Vehicle Systems

S. V. Sreenivasan, P. Nanua
Proc. ASME. DETC-CIE96, Volume 2B: 24th Biennial Mechanisms Conference, V02BT02A021, August 18–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: 96-DETC/MECH-1137
https://doi.org/10.1115/96-DETC/MECH-1137
View Paper titled, Kinematic Geometry of Wheeled Vehicle Systems
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Topics: Geometry, Kinematics, Vehicles, Closed kinematic chains, Design, Mechanical admittance, Screws, Systems theory
Proceedings Papers

Kinematics of Two Wheels Joined by a Variable-Length Axle on Uneven Terrain

P. W. Davis, S. V. Sreenivasan, B. J. Choi
Proc. ASME. DETC97, Volume 2: 23rd Design Automation Conference, V002T29A078, September 14–17, 1997
Publisher: American Society of Mechanical Engineers
Paper No: DETC97/DAC-3857
https://doi.org/10.1115/DETC97/DAC-3857
View Paper titled, Kinematics of Two Wheels Joined by a Variable-Length Axle on Uneven Terrain
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Topics: Kinematics, Vehicles, Wheels
Proceedings Papers

Partial Contact Force Controllability in Active Wheeled Vehicles

B. J. Choi, S. V. Sreenivasan
Proc. ASME. DETC98, Volume 1A: 25th Biennial Mechanisms Conference, V01AT01A011, September 13–16, 1998
Publisher: American Society of Mechanical Engineers
Paper No: DETC98/MECH-5980
https://doi.org/10.1115/DETC98/MECH-5980
View Paper titled, Partial Contact Force Controllability in Active Wheeled Vehicles
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Topics: Vehicles
Proceedings Papers

Design of a Tele-Robotic System for the Maintenance of Boiler Hoppers in Electric Power Plants

Kamel S. Saidi, Jongwon Seo, S. V. Sreenivasan, Carl T. Haas, Alfred E. Traver
Proc. ASME. DETC98, Volume 1B: 25th Biennial Mechanisms Conference, V01BT01A017, September 13–16, 1998
Publisher: American Society of Mechanical Engineers
Paper No: DETC98/MECH-5998
https://doi.org/10.1115/DETC98/MECH-5998
View Paper titled, Design of a Tele-Robotic System for the Maintenance of Boiler Hoppers in Electric Power Plants
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Topics: Boilers, Design, Electricity (Physics), Maintenance, Robotics, Cement clinkers, Poles (Building), Robots, Damage, Doors
Proceedings Papers

Feasible Contact Forces in Semi-Active Vehicles

S. V. Sreenivasan, B. J. Choi
Proc. ASME. DETC99, Volume 1: 25th Design Automation Conference, 1481-1490, September 12–16, 1999
Publisher: American Society of Mechanical Engineers
Paper No: DETC99/DAC-8673
https://doi.org/10.1115/DETC99/DAC-8673
View Paper titled, Feasible Contact Forces in Semi-Active Vehicles
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Topics: Vehicles, Actuators, Biomechanics, Kinematics, Mechanical admittance, Screws, Springs
Proceedings Papers

Partially Constrained Compliant Stages for High Resolution Imprint Lithography

B. J. Choi, S. Johnson, S. V. Sreenivasan, M. Colburn, T. Bailey, C. G. Willson
Proc. ASME. IDETC-CIE2000, Volume 7B: 26th Biennial Mechanisms and Robotics Conference, 861-870, September 10–13, 2000
Publisher: American Society of Mechanical Engineers
Paper No: DETC2000/MECH-14145
https://doi.org/10.1115/DETC2000/MECH-14145
View Paper titled, Partially Constrained Compliant Stages for High Resolution Imprint Lithography
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Topics: Lithography, Resolution (Optics), Design, Errors, Kinematics, Machinery, Optics, Photolithography, Separation (Technology), Shear (Mechanics)
Journal Articles

Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Shrawan Singhal, Michelle A. Grigas, S. V. Sreenivasan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2016, 4(3): 031004.
Paper No: JMNM-16-1008
https://doi.org/10.1115/1.4033742
Published Online: July 1, 2016
View Article titled, Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes
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Topics: Particulate matter, Contamination, Nanofabrication, Film thickness, Deformation, Nanoscale phenomena, Nanomanufacturing
Journal Articles

Size-Dependent Nanoparticle Uptake by Endothelial Cells in a Capillary Flow System

Patrick Jurney, Rachit Agarwal, Krishnendu Roy, S. V. Sreenivasan, Li Shi
Journal: Journal of Nanotechnology in Engineering and Medicine
Publisher: ASME
Article Type: Research-Article
J. Nanotechnol. Eng. Med. February 2015, 6(1): 011007.
Paper No: NANO-15-1049
https://doi.org/10.1115/1.4031856
Published Online: November 6, 2015
View Article titled, Size-Dependent Nanoparticle Uptake by Endothelial Cells in a Capillary Flow System
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Topics: Endothelial cells, Flow (Dynamics), Particulate matter, Shear stress, Nanoparticles, Glass